Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Tadjer, Marko J, Wheeler, Virginia D, Downey, Brian, Robinson, Zachary R, Meyer, David J, Eddy Jr, Charles R and Kub, Fritz J

Published: 2017

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0038110117304264

Author(s): Kim, Yongmin: Provine, J.: Walch, Stephen P: Park, Joonsuk: Phuthong, Witchukorn: Dadlani, Anup Lal: Kim, Hyo Jin: Schindler, Peter: Kim, Kihyun: Prinz, Fritz B

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.6b03194

Author(s): Roige, A, Osso?, J O, Martin, I, Voz, C, Ortega, P, Lopez-Gonzalez, J M, Alcubilla, R and Vega, L F

Published: 2016

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7389963

Author(s): Hsu, Che-Chen, Su, Heng-Wei, Hou, Cheng-Hung, Shyue, Jing-Jong and Tsai, Feng-Yu

Published: 2015

Web link: http://iopscience.iop.org/article/10.1088/0957-4484/26/38/385201

Author(s): Ozgit-Akgun, Cagla: Goldenberg, Eda: Bolat, Sami: Tekcan, Burak: Kayaci, Fatma: Uyar, Tamer: Okyay, Ali Kemal: Biyikli, Necmi

Published: 2015

Web link: http://doi.wiley.com/10.1002/pssc.201400167

Author(s): Kivambe, Maulid, Powell, Douglas M, Castellanos, Sergio, Ann Jensen, Mallory, Morishige, Ashley E, Nakajima, Kazuo, Morishita, Kohei, Murai, Ryota and Buonassisi, Tonio

Published: 2014

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0022024814005971