Gridded RF Ion Sources

Veeco's gridded RF ion sources are designed for improved production of long-run ion beam deposition processes.

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Gridded RF Ion Sources

Veeco's gridded RF ion sources are designed for improved production of long-run ion beam deposition processes.

Get stable power for ion source operation with Veeco’s NOVUS RF lon Source Controller, featuring a state-of-the-art precision control…
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Designed for highly productive in-line systems with substrates, Veeco’s 6 x 22cm gridded linear RF ion source is ideal…
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Ideal for uniform processing of large-scale substrates, Veeco’s 6 x 66cm RF linear ion source provides low-maintenance, filamentless operation…
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Ideal for for use in reactive processes, Veeco’s 16cm RF HP ion source offers beam uniformity of
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Get a broad uniform ion beam source for reactive processes such as ion beam assist or ion beam deposition…
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Improve the performance and quality of long uninterrupted reactive processes such as ion beam assist or ion beam deposition…
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