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MBE Systems

Veeco provides the industry’s broadest line-up of innovative and reliable molecular beam epitaxy (MBE) systems.

The new, award-winning GENxcel system expands on the GENxplor™, the best-selling MBE system since its introduction in August 2013,…
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Get unmatched process flexibility with Veeco’s award-winning GENxplor™ R&D MBE System, featuring Veeco’s proven GEN10™ MBE system growth chamber…
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Get superior throughput, longer campaigns, a smaller footprint and cluster tool wafer handling with The GEN2000® MBE system.
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As the most cost-effective and highest-capacity multi-4″ production MBE system in the market, Veeco’s GEN200® MBE system delivers superior…
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Get an ultra-flexible tool with Veeco’s GEN20™ MBE system. It’s configurable for III-V and emerging materials, including applications that…
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The GEN930® MBE system is ideal for developing III-V or II-VI materials with direct pump coupling for nitride and…
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As the most economical, flexible cluster tool system in a proven platform, the GEN10™ MBE System allows for up…
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