Specialty Sources

Veeco offers the most comprehensive selection of MBE sources, including single and dual filament designs.

Achieve low-cost introduction of source gases such as CBr4 and NH3 for MBE systems with Veeco’s Low Temperature Gas…
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Get optimal conditions for GaN growth of electronic and optoelectronic materials, plus unrivaled plasma stability and reproducibility, with the…
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For high-performance UHV delivery of gases, Veeco’s Gas Crackers offer unique features to optimize flux uniformity.
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Veeco’s retractable sources address fundamental limitations of MBE, including source capacity, source removal for maintenance and system uptime.
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An all-refractory metal source designed for operation at 1800-2200°C, the Atom-H Source is compatible with most preparation and growth…
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Achieve precise MBE operation at medium temperatures and partial pressures with Veeco oxygen-resistant, extended life sources.
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